Application of mini linear guide in optical instruments
micro linear slide (width ≤ 15mm, height ≤ 10mm) because of the compact size, precision control, become the optical instrument to realize the micro-regulation and precision transmission of the core components, its application covers the optical path regulation, imaging systems, detection devices and other key links, the core role is reflected in the "nanometer displacement The core role is reflected in the precise control of "nanoscale displacement".
I. Positioning support in the optical path adjustment system
Lens attitude fine-tuning
In the monochromator of the spectrometer, the angle adjustment of the grating or prism relies on a miniature linear guide. The guide carries the lens support (weight ≤ 50g), through the screw drive to achieve ± 0.01mm linear displacement, which translates into an angle change of 0.001 ° of the lens, to ensure that the incident light is accurately focused on the detector. The straightness error of the guide rail should be controlled at ≤0.001mm/m to avoid spectral peak drift (≤0.1nm) caused by track offset.
Filter switching device
The filter wheel of the fluorescence microscope is equipped with a miniature linear guide underneath, which is used for switching filters of different wavelengths. The guide travels 30-50mm, with a repeatable positioning error of ≤0.002mm, ensuring that the center of the filter coincides with the axis of the optical path (deviation ≤0.01mm) and avoiding the interference of stray light. Its sliding friction fluctuation ≤ 0.01N, to prevent the vibration of switching to affect the clarity of imaging.
Second, the dynamic transmission in the imaging system
Camera focusing mechanism
The focusing of the CCD camera of the high-end metallographic microscope relies on a miniature linear guide. The guide rail drives the camera to move along the optical axis (stroke ≤ 20mm), with positioning accuracy ≤ 0.0005mm, and the closed-loop control is realized with the grating scale to ensure that the deviation between the imaging plane and the focal plane is ≤ 0.001mm, with a resolution of 1000 line pairs/mm.
Objective switching frame
The linear drive of multi-objective converter adopts miniature guide rail, carrying 3-5 objectives (total weight ≤200g). The parallelism error of the guide rail is ≤0.002mm/m, which ensures that the coaxiality between the optical axis of the objective lens and the center of the carrier table after the switching is ≤0.01mm, avoiding imaging offset. Its running speed is ≤5mm/s, which reduces the airflow disturbance during switching.
Precision movement in the detection device
Sample stage drive
The sample stage of the laser interferometer adopts a miniature linear guide to drive the sample to realize X/Y-axis movement (stroke ≤ 100mm). The straightness of the guide rail ≤ 0.001mm / m, to ensure that the laser beam on the sample surface of the incident angle deviation ≤ 0.0001 °, the measurement error is controlled within ± 0.01μm.
Spot Scanning Mechanism
The spot scanning system of the laser particle sizer drives the reflector through a miniature guide rail, with a scanning range of ≤50mm. The repetitive positioning error of the guide rail is ≤0.001mm, which ensures that the deviation of the spot on the detector is ≤0.005mm, and the accuracy of the particle size measurement reaches ±1%.
Core features of adaptable optical instruments
Low cross-section design
The guide rail with a height of ≤8mm can be integrated inside the optical lens to avoid blocking the optical path (light-through aperture ≥φ20mm), which is suitable for endoscopes, fiber-optic spectrometers and other equipments with space constraints.
Low friction torque
Sliding friction ≤ 0.5N, with piezoelectric motor drive, it can realize 0.1μm stepping displacement, which meets the needs of microscopic operation such as grating fine adjustment and slit width adjustment.
Vibration resistance
The clearance between the guide rail and slider is ≤0.001mm, and the amplitude is ≤0.0005mm when the vibration frequency is ≤100Hz, which ensures the measurement accuracy of the laser interferometer, photolithography and other equipments in the external vibration environment.
Material compatibility
is made of stainless steel (SUS440C) or aluminum alloy (6061-T6), with surface roughness Ra ≤ 0.02μm, to avoid reflections interfering with the optical path, and at the same time, it is adapted to clean environments of optical instruments (ISO Class 5 clean room).
Summarize
miniature linear guide in optical instruments, the essence is to ensure the stability of the optical path, the clarity of imaging and the accuracy of the measurement through the microscopic scale of the precise transmission. The core is not the "miniaturization" of the size, but the realization of nanoscale motion control in a limited space, which becomes the key transformation of the optical system from "design accuracy" to "actual performance". Carrier.
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